SURFACE-PROPERTIES OF METAL-NITRIDE AND METAL-CARBIDE FILMS DEPOSITED ON NB FOR RADIOFREQUENCY SUPERCONDUCTIVITY

被引:38
作者
GARWIN, EL [1 ]
KING, FK [1 ]
KIRBY, RE [1 ]
AITA, O [1 ]
机构
[1] UNIV OSAKA PREFECTURE,COLL ENGN,SAKAI,OSAKA 591,JAPAN
关键词
D O I
10.1063/1.338159
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1145 / 1154
页数:10
相关论文
共 23 条
  • [1] ERMOLIEFF A, 1985, APPL SURF SCI, V21, P65, DOI 10.1016/0378-5963(85)90008-X
  • [2] ANGULAR RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF REACTIVELY SPUTTERED TITANIUM NITRIDE
    ERNSBERGER, C
    NICKERSON, J
    MILLER, AE
    MOULDER, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2415 - 2418
  • [3] SECONDARY-ELECTRON YIELD AND AUGER-ELECTRON SPECTROSCOPY MEASUREMENTS ON OXIDES, CARBIDE, AND NITRIDE OF NIOBIUM
    GARWIN, EL
    HOYT, EW
    KIRBY, RE
    MOMOSE, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) : 3245 - 3250
  • [4] SECONDARY-ELECTRON EMISSION AND CONDUCTIVITY MECHANISMS OF EPITAXIAL MGO FILMS
    GIBSON, JW
    THOMAS, RE
    [J]. APPLIED SURFACE SCIENCE, 1982, 14 (01) : 56 - 72
  • [5] XPS AND AES STUDIES ON OXIDE-GROWTH AND OXIDE COATINGS ON NIOBIUM
    GRUNDNER, M
    HALBRITTER, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) : 397 - 405
  • [6] ON THE NATURAL NB2O5 GROWTH ON NB AT ROOM-TEMPERATURE
    GRUNDNER, M
    HALBRITTER, J
    [J]. SURFACE SCIENCE, 1984, 136 (01) : 144 - 154
  • [7] ON SURFACE-COATINGS AND SECONDARY YIELD OF NB3SN AND NB
    GRUNDNER, M
    HALBRITTER, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) : 5396 - 5405
  • [8] PHOTOEMISSION-STUDY OF THE ELECTRONIC-STRUCTURE OF STOICHIOMETRIC AND SUBSTOICHIOMETRIC TIN AND ZRN
    HOCHST, H
    BRINGANS, RD
    STEINER, P
    WOLF, T
    [J]. PHYSICAL REVIEW B, 1982, 25 (12) : 7183 - 7191
  • [9] HOFFMAN S, 1982, J TRACE MICROPROBE T, V1, P213
  • [10] ELECTRON-SPECTROSCOPY OF CONDENSED MULTILAYERS - LINE-SHAPE CHANGES DUE TO BEAM DAMAGE AND EXCITATION MODE
    HOLLOWAY, PH
    MADEY, TE
    CAMPBELL, CT
    RYE, RR
    HOUSTON, JE
    [J]. SURFACE SCIENCE, 1979, 88 (01) : 121 - 137