PHOTO-ASSISTED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZINC-OXIDE THIN-FILMS

被引：10

作者：

MARUYAMA, T

NAKAI, A

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 03期

关键词：

D O I：

10.1143/JJAP.28.L346

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：L346 / L348

页数：3

相关论文

共 6 条

[1] GROWTH OF EPITAXIAL ZNO THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
LAU, CK
TIKU, SK
LAKIN, KM
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : 1843 - 1847
[2] SEMICONDUCTING ZINC-OXIDE FILMS PREPARED BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION FROM DIETHYL ZINC
ROTH, AP
WILLIAMS, DF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) : 2684 - 2686
[3] GROWTH OF ZNO FILMS BY THE PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION TECHNIQUE
SHIMIZU, M
MATSUEDA, Y
SHIOSAKI, T
KAWABATA, A
[J]. JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) : 209 - 219
[4] LOW-TEMPERATURE GROWTH OF ZNO FILM BY PHOTO-MOCVD
SHIMIZU, M
KAMEI, H
TANIZAWA, M
SHIOSAKI, T
KAWABATA, A
[J]. JOURNAL OF CRYSTAL GROWTH, 1988, 89 (04) : 365 - 370
[5] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ORIENTED ZNO FILMS OVER LARGE AREAS
SMITH, FTJ
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (12) : 1108 - 1110
[6] LASER-INDUCED DEPOSITION OF ZINC-OXIDE
SOLANKI, R
COLLINS, GJ
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (08) : 662 - 663