GROWTH-MECHANISM OF ZNS AND ZNSE FILMS IN LOW-PRESSURE MOCVD

被引:26
作者
YOSHIKAWA, A
SIRAI, A
YAMAGA, S
KASAI, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 05期
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D O I
10.1143/JJAP.25.673
中图分类号
O59 [应用物理学];
学科分类号
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页码:673 / 678
页数:6
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共 17 条
[2]  
BLANCONNIER P, 1978, THIN SOLID FILMS, V55, P375, DOI 10.1016/0040-6090(78)90154-2
[3]   GROWTH AND PROPERTIES OF UNDOPED N-TYPE ZNSE BY LOW-TEMPERATURE AND LOW-PRESSURE OMVPE [J].
FUJITA, S ;
MATSUDA, Y ;
SASAKI, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (06) :L360-L362
[4]   GROWTH OF ZNS BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
FUJITA, S ;
TOMOMURA, Y ;
SASAKI, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (09) :L583-L585
[5]  
FUJITA S, 1984, 1984 SOL STAT DEV MA, P651
[6]  
HIRAHARA K, 1983, 15TH C SOL STAT DEV, P349
[7]   USE OF METAL-ORGANICS IN PREPARATION OF SEMICONDUCTOR MATERIALS .2. II-VI COMPOUNDS [J].
MANASEVIT, HM ;
SIMPSON, WI .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) :644-+
[8]   COHERENT GROWTH OF ZNSE ON GAAS BY MOCVD [J].
MITSUHASHI, H ;
MITSUISHI, I ;
MIZUTA, M ;
KUKIMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (08) :L578-L580
[9]   ORGANOMETALLIC VAPOR-DEPOSITION OF EPITAXIAL ZNSE FILMS ON GAAS SUBSTRATES [J].
STUTIUS, W .
APPLIED PHYSICS LETTERS, 1978, 33 (07) :656-658