DIRECT, MASS-ANALYZED ION-BEAM AND ARC-DISCHARGE DEPOSITION OF DIAMOND-LIKE FILMS

被引:11
作者
HIRVONEN, JP [1 ]
KOSKINEN, J [1 ]
LAPPALAINEN, R [1 ]
ANTTILA, A [1 ]
TRKULA, M [1 ]
机构
[1] UNIV HELSINKI, DEPT PHYS, SF-00170 HELSINKI 17, FINLAND
关键词
DIAMOND-LIKE FILM; ION BEAM DEPOSITION; ARC DISCHARGE TECHNIQUE;
D O I
10.1007/BF02653313
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Utilizing mass-analyzed carbon beams at an energy range of 10 eV to 2 keV, we can fabricate diamondlike films with direct deposition. This process allows a very precise adjustment of deposition parameters such as ion energy, ion current density, angle of incidence, and control of impurities at an isotopic level. We obtained a density of 3.3-3.5 g/cm3, which is very close to the corresponding values of natural diamond. The most serious disadvantage of direct deposition is a low growth rate. Using an arc-discharge method provides more feasible deposition rates while simultaneously retaining many beneficial effects of direct deposition. These results were also confirmed by spectroscopic studies that revealed similar characteristics on both films. This paper reviews deposition of diamondlike films produced with direct, mass-analyzed ion-beam and arc-discharge methods and presents some properties of these films.
引用
收藏
页码:127 / 132
页数:6
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