COMPARISON OF DIAMOND-LIKE COATINGS DEPOSITED WITH C+ AND VARIOUS HYDROCARBON ION-BEAMS

被引：51

作者：

ANTTILA, A ^{[1
]}

KOSKINEN, J ^{[1
]}

LAPPALAINEN, R ^{[1
]}

HIRVONEN, JP ^{[1
]}

STONE, D ^{[1
]}

PASZKIET, C ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 03期

关键词：

D O I：

10.1063/1.97693

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：132 / 134

页数：3

共 11 条

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