DIAMONDLIKE CARBON-FILMS - OPTICAL-ABSORPTION, DIELECTRIC-PROPERTIES, AND HARDNESS DEPENDENCE ON DEPOSITION PARAMETERS

被引：27

作者：

NATARAJAN, V ^{[1
]}

LAMB, JD ^{[1
]}

WOOLLAM, JA ^{[1
]}

LIU, DC ^{[1
]}

GULINO, DA ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573280

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：681 / 685

页数：5

共 13 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[2] ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS [J].

BANKS, BA ;

RUTLEDGE, SK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :807-814

[3]

CAMPBELL DS, 1978, ACTIVE PASSIVE THIN, P144

[4]

DILLON RO, 1984, PHYS REV B, V15, P3482

[5]

INGRAM DC, UNPUB THIN SOLID FIL

[6]

INGRAM DC, 1984, B AM PHYS SOC, V29, P379

[7]

Jonscher AK., 1980, I PHYS C SER, V58, P22

[8]

MOTT NF, 1971, ELECTRONIC PROCESSES, P197

[9] SOME CHARACTERISTICS OF HARD CARBONACEOUS FILMS [J].

OJHA, SM ;

HOLLAND, L .

THIN SOLID FILMS, 1977, 40 (JAN) :L31-L32

[10] OPTICAL-CONSTANTS OF A HYDROGENATED AMORPHOUS-CARBON FILM [J].

SMITH, FW .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (03) :764-771

← 1 2 →