RELATION BETWEEN LIGHT-SCATTERING AND MORPHOLOGY OF COLUMNAR STRUCTURED OPTICAL THIN-FILMS

被引：11

作者：

DUPARRE, A

DOHLE, R

MULLER, H

机构：

[1] JENOPTIK GMBH JENA,O-6900 JENA,GERMANY

[2] ACAD SCI GDR,INST PHYS TECH,O-6900 JENA,GERMANY

来源：

JOURNAL OF MODERN OPTICS | 1990年 / 37卷 / 08期

关键词：

D O I：

10.1080/09500349014551521

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A statistical model is presented describing the surface roughness of columnar structured thin films. Based on this model, a formula has been derived relating total integrated light scattering to the evolutionary exponent that represents a quantitative characterization of the evolution of the columns with film thickness. The examination of evaporated PbF2 films offers the opportunity to test the suitability of the theoretical considerations by comparing results calculated from scattering data with transmission electron microscopy observations. © 1990 Taylor & Francis Ltd.

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页码：1383 / 1390

页数：8

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