PROTECTIVE COATINGS OF AMORPHIC DIAMOND ON FRAGILE AND SENSITIVE SUBSTRATES

被引:7
作者
LEE, TJ [1 ]
PARK, H [1 ]
YOU, JH [1 ]
DAVANLOO, F [1 ]
COLLINS, CB [1 ]
机构
[1] UNIV TEXAS,CTR QUANTUM ELECTR,POB 830688,RICHARDSON,TX 75083
关键词
D O I
10.1016/S0257-8972(07)80086-7
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphic diamond films can be grown with a laser plasma discharge source in an ultrahigh vacuum environment without the use of any catalyst. This technique produces films that adhere more readily to substrates. Described here is a study of the bonding and properties realized in one such example, the deposition of amorphic diamond on germanium. Measurements with Rutherford-backscattering spectrometry and transmission electron microscopy showed that the diamond coatings deposited from laser plasmas were bonded to the germanium substrates through an interfacial layer 200-300 angstrom thick. Resistance to wear was estimated with a modified sandblaster and it was shown that a coating of only 1.4 mum of amorphic diamond can increase the lifetime of samples by a factor of better than 12. Results of other mechanical measurements such as hardness and friction tests are also described.
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收藏
页码:581 / 585
页数:5
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