EVIDENCE OF A CHARGE INDUCED CONTRIBUTION TO THE SPUTTERING YIELD OF INSULATING AND SEMICONDUCTING MATERIALS

[1] Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[2] DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV [J]. VACUUM, 1984, 34 (1-2) : 163 - 166

[3] Betz G., 1983, SPUTTERING PARTICLE, P11

[4] Bitenskii I. S., 1979, Soviet Physics - Technical Physics, V24, P618

[5] BOERS AL, COMMUNICATION

[6] A COMPARISON OF ATOM AND ION INDUCED SSIMS - EVIDENCE FOR A CHARGE INDUCED DAMAGE EFFECT IN INSULATOR MATERIALS [J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (5-6) : 871 - 877

[7] STATIC SIMS FOR APPLIED SURFACE-ANALYSIS [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (01) : 1 - 14

[8] DIXON A, UNPUB

[9] DREYFUS RW, NUCL INSTRUM METHO B

[10] ECCLES AJ, UNPUB J VAC SCI TE B

[1] Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[2] DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV [J]. VACUUM, 1984, 34 (1-2) : 163 - 166

[3] Betz G., 1983, SPUTTERING PARTICLE, P11

[4] Bitenskii I. S., 1979, Soviet Physics - Technical Physics, V24, P618

[5] BOERS AL, COMMUNICATION

[6] A COMPARISON OF ATOM AND ION INDUCED SSIMS - EVIDENCE FOR A CHARGE INDUCED DAMAGE EFFECT IN INSULATOR MATERIALS [J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (5-6) : 871 - 877

[7] STATIC SIMS FOR APPLIED SURFACE-ANALYSIS [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (01) : 1 - 14

[8] DIXON A, UNPUB

[9] DREYFUS RW, NUCL INSTRUM METHO B

[10] ECCLES AJ, UNPUB J VAC SCI TE B