DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV

被引：3

作者：

BANGERT, U ^{[1
]}

JEYNES, C ^{[1
]}

GOODHEW, P ^{[1
]}

WILSON, IH ^{[1
]}

机构：

[1] UNIV SURREY,DEPT MET & MAT SCI,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

VACUUM | 1984年 / 34卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(84)90121-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：163 / 166

页数：4

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