EFFECTS OF BOMBARDMENT BY LOW-ENERGY NEUTRAL PARTICLES ON SILICON DIOXIDE FILMS

被引：7

作者：

MCCAUGHAN, DV

KUSHNER, RA

SIMMS, DL

WHITE, CW

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[2] OAK RIDGE NATL LAB,OAK RIDGE,TN 37830

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 01期

关键词：

D O I：

10.1063/1.327370

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：299 / 304

页数：6

共 19 条

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[8] ION NEUTRALIZATION PROCESSES AT INSULATOR SURFACES AND CONSEQUENT IMPURITY MIGRATION EFFECTS IN SIO2 FILMS [J].

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PHYSICAL REVIEW LETTERS, 1973, 30 (13) :614-617

[9] LOW-ENERGY ION-BOMBARDMENT OF SILICON DIOXIDE FILMS ON SILICON .2. INERT AMBIENT ANNEALING OF DEGRADATION IN MOS DEVICES [J].

MCCAUGHAN, DV ;

MURPHY, VT .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (07) :3182-3190

[10] DIFFERENCES IN SODIUM-TRANSPORT IN SIO2-FILMS CAUSED BY ION AND NEUTRAL-PARTICLE BOMBARDMENT [J].

MCCAUGHAN, DV ;

WHITE, CW ;

KUSHNER, RA ;

SIMMS, DL .

APPLIED PHYSICS LETTERS, 1979, 35 (05) :405-407

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