TIME RESOLVED IMAGING AT 130-A WITH SUBMICRON RESOLUTION

被引：13

作者：

DESSELBERGER, M

AFSHARRAD, T

KHATTAK, F

VIANA, S

WILLI, O

机构：

[1] Imperial College of Science, Technology and Medicine, Blackett Laboratory, London

来源：

APPLIED OPTICS | 1991年 / 30卷 / 17期

关键词：

D O I：

10.1364/AO.30.002285

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel and simple XUV imaging technique using a laser-produced plasma source is described. A spatial resolution of better than 0.8-mu-m is demonstrated.

引用

页码：2285 / 2286

页数：2

共 5 条

[1]

CORCORAN E, 1990, SCI AM, V263, P80

[2]

DESSELBERGER M, IN PRESS PHYS REV LE

[3]

Driscoll W.G., 1978, HDB OPTICS

[4] NOVEL TIME-RESOLVED VUV SPECTROGRAPH FOR X-RAY LASER RESEARCH [J].

KIEHN, GP ;

WILLI, O ;

DAMERELL, AR ;

KEY, MH .

APPLIED OPTICS, 1987, 26 (03) :425-426

[5] NONDESTRUCTIVE SINGLE-SHOT SOFT-X-RAY LITHOGRAPHY AND CONTACT MICROSCOPY USING A LASER-PRODUCED PLASMA SOURCE [J].

ROSSER, RJ ;

FEDER, R ;

NG, A ;

ADAMS, F ;

CELLIERS, P ;

SPEER, RJ .

APPLIED OPTICS, 1987, 26 (19) :4313-4318

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