METHOD FOR THE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS - DEPENDENCE ON EXPERIMENTAL UNCERTAINTIES

被引：22

作者：

DELPOZO, JM

DIAZ, L

机构：

[1] Instituto de Optica, Consejo Superior de Investigaciones Cientificas, Madrid, 28006

来源：

APPLIED OPTICS | 1992年 / 31卷 / 22期

关键词：

Optical constants; Reflectance; Thickness; Thin films; Transmittance;

D O I：

10.1364/AO.31.004474

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The analytical dependence of sigma(n) and sigma(k) on related experimental uncertainties when conventional reflectance-transmittance methods for the determination of optical constants of thin films are used has been found. Two kinds of singularity appear. These are responsible for the loss of solution in these methods. From the properties of the derivatives of n and k with respect to the measured thickness, a new method has been developed without loss of solution. Different derivative behaviors for physical and nonphysical solutions were found. The film thickness is also determined by this method with an accuracy better than 0.2%. The method has been applied to thin films of amorphous germanium.

引用

页码：4474 / 4481

页数：8

共 15 条

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