MEASUREMENT OF THE SPUTTERING YIELD OF FE FROM AN OXIDIZED STAINLESS-STEEL TARGET USING A PULSED DYE-LASER

The relative change of the sputtering yield of neutral iron from an oxidized 321 stainless steel target was measured by atomic fluorescence spectroscopy (AFS) using a pulsed dye laser. At the same time the relative sputtering yields of Fe** plus and Cr** plus and also the total sputtering yield of the oxidized target was determined respectively with a quadrupole mass filter and a piezoelectric microbalance. The yields were measured as a function of the applied dose, and compared to the depth profiles measured by Auger electron spectroscopy (AES).