THE INFLUENCE OF THE CROSS-SECTION OF THE ELECTRON-COPPER ATOM COLLISION ON THE ELECTRICAL-CONDUCTIVITY OF AR-CU AND SF6-CU PLASMAS

被引:28
作者
CHERVY, B [1 ]
DUPONT, O [1 ]
GLEIZES, A [1 ]
KRENEK, P [1 ]
机构
[1] ACAD SCI CZECH REPUBL,INST ELECT ENGN,CR-18202 PRAGUE 8,CZECH REPUBLIC
关键词
D O I
10.1088/0022-3727/28/10/010
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical conductivity of SF6-Cu and Ar-Cu plasmas has been calculated by using new values of the cross section of the electron-copper momentum transfer. The comparison between the new values of the electrical conductivity and the previous ones, in the temperature range 2500-15 000 K, shows the actual influence of copper vapour on this transport coefficient and allows quantification of the errors made with the various approximations.
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页码:2060 / 2066
页数:7
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