THE INFLUENCE OF DIFFERENT HYDROCARBONS ON PREPARATION, STRUCTURE AND WEAR-RESISTANCE OF CVD-TICX-HARD LAYERS

被引：5

作者：

LEONHARDT, A

WOLF, E

机构：

来源：

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK | 1994年 / 25卷 / 02期

关键词：

D O I：

10.1002/mawe.19940250207

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiC(x)-layers have been deposited onto hardmetals by means of thermal CVD using different hydrocarbons (methane, n-heptane, cyclohexane, benzene, ethylbenzene, xylene). The deposition process, layer growth and structure properties (texture, substructure) remarkably depend on hydrocarbons used. Correlations have been obtained between the thermal stability of the hydrocarbons, deposition behaviour, deposition rate and structure properties of the layers. Conclusions are drawn for practical applications of the results.

引用

页码：79 / 85

页数：7