FEATURES OF THE INITIAL GROWTH OF GOLD-FILMS DEPOSITED ON ROCK-SALT SUBSTRATES BY ION-BEAM SPUTTERING

被引：14

作者：

LANE, GE

ANDERSON, JC

机构：

[1] Materials Section, Department of Electrical Engineering, Imperial College, London

来源：

THIN SOLID FILMS | 1979年 / 57卷 / 02期

关键词：

D O I：

10.1016/0040-6090(79)90163-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An ion beam sputtering system was used to study the role of the angle of incidence of the sputtered particles on the substrate. It is proposed that differences between these results and those at normal incidence could be due to non-thermal equilibration of some of the incident atoms. © 1979.

引用

页码：277 / 283

页数：7

共 4 条

[1] INITIAL GROWTH OF THIN FILMS - FRACTIONAL NUCLEATION RATE CONCEPT [J].