THE SN-3/2 DEPENDENCE OF NON-LINEAR SPUTTERING YIELDS

被引：3

作者：

HIRAOKA, N ^{[1
]}

KITAZOE, Y ^{[1
]}

YAMAMURA, Y ^{[1
]}

机构：

[1] OKAYAMA COLL SCI,DEPT APPL PHYS,OKAYAMA 700,JAPAN

来源：

RADIATION EFFECTS LETTERS | 1981年 / 67卷 / 1-2期

关键词：

D O I：

10.1080/01422448108226561

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：7 / 12

页数：6

共 39 条

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[3]

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ANDERSEN, HH ;

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[8] DEPENDENCE OF SPUTTERING COEFFICIENT ON ION DOSE [J].

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[9]

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[10]

DAHLGREN SD, 1972, J APPL PHYS, V43, P1514, DOI 10.1063/1.1661352

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