MONTE CARLO CALCULATIONS OF ELECTRON-SAMPLE INTERACTIONS IN SCANNING ELECTRON MICROSCOPE

被引：90

作者：

SHIMIZU, R

MURATA, K

机构：

来源：

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D O I：

10.1063/1.1659606

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：387 / &

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