PROTON-INDUCED X-RAY CROSS-SECTIONS FOR SELECTED ELEMENTS FE TO AS AND APPLICATIONS OF X-RAY ANALYSIS TO SEMICONDUCTOR SYSTEMS

被引：21

作者：

GRAY, TJ

LEAR, R

DEXTER, RJ

SCHWETTMANN, FN

WIEMER, KC

机构：

[1] N TEXAS STATE UNIV, DENTON, TX 76203 USA

[2] TEXAS INSTR INC, DALLAS, TX USA

来源：

THIN SOLID FILMS | 1973年 / 19卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90028-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：103 / 119

页数：17

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