THE ADSORPTION AND REACTION OF FLUORINE ON THE SI(100) SURFACE

被引：89

作者：

ENGSTROM, JR

NELSON, MM

ENGEL, T

机构：

来源：

SURFACE SCIENCE | 1989年 / 215卷 / 03期

关键词：

D O I：

10.1016/0039-6028(89)90271-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：437 / 500

页数：64

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