CROSS SECTIONS AND OHMIC RESISTANCE OF DIFFUSION PIPES IN SILICON

被引:9
作者
GOETZBERGER, A
STEPHENS, C
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D O I
10.1149/1.2425505
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:604 / 607
页数:4
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