THE SPUTTERING OF INSULATING MATERIALS BY FAST HEAVY-IONS

被引:45
作者
SEIBERLING, LE [1 ]
MEINS, CK [1 ]
COOPER, BH [1 ]
GRIFFITH, JE [1 ]
MENDENHALL, MH [1 ]
TOMBRELLO, TA [1 ]
机构
[1] CALTECH,WK KELLOGG RADIAT LAB,PASADENA,CA 91125
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 198卷 / 01期
关键词
D O I
10.1016/0167-5087(82)90045-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:17 / 25
页数:9
相关论文
共 28 条
  • [1] BESENBACHER F, UNPUB
  • [2] BIERSACK JP, 1976, NUCL INSTRUM METHODS, V132, P229, DOI 10.1016/0029-554X(76)90739-4
  • [3] ENERGY-DEPENDENCE OF THE EROSION OF H2O ICE FILMS BY H AND HE IONS
    BROWN, WL
    AUGUSTYNIAK, WM
    BRODY, E
    COOPER, B
    LANZEROTTI, LJ
    RAMIREZ, A
    EVATT, R
    JOHNSON, RE
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 321 - 325
  • [4] SPUTTERING OF ICE BY MEV LIGHT-IONS
    BROWN, WL
    LANZEROTTI, LJ
    POATE, JM
    AUGUSTYNIAK, WM
    [J]. PHYSICAL REVIEW LETTERS, 1978, 40 (15) : 1027 - 1030
  • [5] COOPER BH, 1981, THESIS CALIFORNIA I
  • [6] DESORPTION OF ORGANIC-COMPOUNDS FROM SOLID-SURFACES BY BOMBARDMENT WITH HEAVY-IONS FROM A TANDEM ACCELERATOR
    DUCK, P
    TREU, W
    FROHLICH, H
    GALSTER, W
    VOIT, H
    [J]. SURFACE SCIENCE, 1980, 95 (2-3) : 603 - 613
  • [7] EXPERIMENTAL INVESTIGATION ABOUT MECHANISM OF FISSION-FRAGMENT INDUCED DESORPTION
    FURSTENAU, N
    KNIPPELBERG, W
    KRUEGER, FR
    WEISS, G
    WIEN, K
    [J]. ZEITSCHRIFT FUR NATURFORSCHUNG SECTION A-A JOURNAL OF PHYSICAL SCIENCES, 1977, 32 (07): : 711 - 719
  • [8] SPUTTERING OF URANIUM TETRAFLUORIDE IN THE ELECTRONIC STOPPING REGION
    GRIFFITH, JE
    WELLER, RA
    SEIBERLING, LE
    TOMBRELLO, TA
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 51 (3-4): : 223 - 232
  • [9] GRIFFITH JE, 1979, THESIS CALIFORNIA I
  • [10] POSSIBLE NEW SPUTTERING MECHANISM IN TRACK REGISTERING MATERIALS
    HAFF, PK
    [J]. APPLIED PHYSICS LETTERS, 1976, 29 (08) : 473 - 475