SIMPLE METHOD OF SPECTROSCOPIC REFLECTOMETRY FOR THE COMPLETE OPTICAL ANALYSIS OF WEAKLY ABSORBING THIN-FILMS - APPLICATION TO SILICON FILMS

被引：15

作者：

OHLIDAL, I

NAVRATIL, K

机构：

[1] Purkyne Univ Brno, Brno, Czech, Purkyne Univ Brno, Brno, Czech

来源：

THIN SOLID FILMS | 1988年 / 156卷 / 02期

关键词：

D O I：

10.1016/0040-6090(88)90313-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：181 / 189

页数：9

共 10 条

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THIN SOLID FILMS, 1984, 120 (01) :23-30

[2]

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[3]

CISNEROS JI, 1983, THIN SOLID FILMS, V100, P155, DOI 10.1016/0040-6090(83)90471-6

[4] SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM [J].

MANIFACIER, JC ;

GASIOT, J ;

FILLARD, JP .

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[5] DETERMINATION OF THE OPTICAL-CONSTANTS AND THICKNESS OF AMORPHOUS V2O5 THIN-FILMS [J].

MICHAILOVITS, L ;

HEVESI, I ;

PHAN, L ;

VARGA, Z .

THIN SOLID FILMS, 1983, 102 (01) :71-76

[6] A NEW METHOD FOR THE COMPLETE OPTICAL ANALYSIS OF WEAKLY ABSORBING THIN-FILMS - APPLICATION TO POLYCRYSTALLINE SILICON FILMS [J].

OHLIDAL, I ;

NAVRATIL, K ;

MUSILOVA, J .

THIN SOLID FILMS, 1985, 127 (3-4) :191-203

[7]

OHLIDAL I, 1982, APPL PHYS A-MATER, V29, P157, DOI 10.1007/BF00617773

[8]

OHLIDAL I, 1974, FOLIA FS NATL U PURK, V16, P1

[9]

OHLIDAL I, 1984, FOLIA FAC SCI NAT U, V37, P5

[10]

Vasicek A., 1960, OPTICS THIN FILMS

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