LASER-DIRECT-WRITTEN CAPACITORS AND INDUCTORS FOR GAAS MONOLITHIC MICROWAVE INTEGRATED-CIRCUIT TRIMMING

被引:4
作者
CHEN, CL
BLACK, JG
DORAN, SP
MAHONEY, LJ
MURPHY, RA
EHRLICH, DJ
机构
关键词
D O I
10.1049/el:19880955
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:1396 / 1398
页数:3
相关论文
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SEDLACEK, JHC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :419-422
[2]  
Chen C. L., 1987, GaAs IC Symposium: IEEE Gallium Arsenide Integrated Circuit Symposium. Technical Digest 1987 (Cat. No.87CH2506-4), P167
[3]   GAAS MONOLITHIC MICROWAVE INTEGRATED-CIRCUIT TRIMMING USING LASER-DIRECT-WRITTEN TUNGSTEN MICROSTRIP LINES [J].
CHEN, CL ;
BLACK, JG ;
MAHONEY, LJ ;
DORAN, SP ;
COURTNEY, WE ;
EHRLICH, DJ ;
MURPHY, RA .
ELECTRONICS LETTERS, 1987, 23 (08) :402-403
[4]  
GOYAL R, 1987, MICROWAVE J, V30, P135