LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS

被引:19
作者
BLACK, JG
EHRLICH, DJ
ROTHSCHILD, M
DORAN, SP
SEDLACEK, JHC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词
D O I
10.1116/1.583917
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:419 / 422
页数:4
相关论文
共 16 条
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    [J]. IEEE ELECTRON DEVICE LETTERS, 1984, 5 (02) : 32 - 35
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    EHRLICH, DJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 414 - 418