LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS

[1] BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[2] RAPID LOW-RESISTANCE INTERCONNECTS BY SELECTIVE TUNGSTEN DEPOSITION ON LASER-DIRECT-WRITTEN POLYSILICON [J]. IEEE ELECTRON DEVICE LETTERS, 1986, 7 (07) : 422 - 424

[3] BLACK JG, IN PRESS APPL PHYS L

[4] EHRLICH DJ, 1984, APPL PHYS LETT, V44, P267, DOI 10.1063/1.94694

[5] LASER MICROCHEMICAL TECHNIQUES FOR REVERSIBLE RESTRUCTURING OF GATE-ARRAY PROTOTYPE CIRCUITS [J]. IEEE ELECTRON DEVICE LETTERS, 1984, 5 (02) : 32 - 35

[6] EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[7] EHRLICH DJ, 1985, SOLID STATE TECHNOL, V28, P81

[8] JOHNSON RW, 1986, P IEEE INT SOLID STA, P166

[9] WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J]. APPLIED PHYSICS LETTERS, 1983, 43 (10) : 946 - 948

[10] VISIBLE-LASER PHOTOCHEMICAL ETCHING OF CR, MO, AND W [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 414 - 418

[1] BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[2] RAPID LOW-RESISTANCE INTERCONNECTS BY SELECTIVE TUNGSTEN DEPOSITION ON LASER-DIRECT-WRITTEN POLYSILICON [J]. IEEE ELECTRON DEVICE LETTERS, 1986, 7 (07) : 422 - 424

[3] BLACK JG, IN PRESS APPL PHYS L

[4] EHRLICH DJ, 1984, APPL PHYS LETT, V44, P267, DOI 10.1063/1.94694

[5] LASER MICROCHEMICAL TECHNIQUES FOR REVERSIBLE RESTRUCTURING OF GATE-ARRAY PROTOTYPE CIRCUITS [J]. IEEE ELECTRON DEVICE LETTERS, 1984, 5 (02) : 32 - 35

[6] EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[7] EHRLICH DJ, 1985, SOLID STATE TECHNOL, V28, P81

[8] JOHNSON RW, 1986, P IEEE INT SOLID STA, P166

[9] WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J]. APPLIED PHYSICS LETTERS, 1983, 43 (10) : 946 - 948

[10] VISIBLE-LASER PHOTOCHEMICAL ETCHING OF CR, MO, AND W [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 414 - 418