WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS

被引：55

作者：

MCWILLIAMS, BM

HERMAN, IP

MITLITSKY, F

HYDE, RA

WOOD, LL

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 10期

关键词：

D O I：

10.1063/1.94191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：946 / 948

页数：3

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