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LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS
被引:19
作者
:
BLACK, JG
论文数:
0
引用数:
0
h-index:
0
BLACK, JG
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
ROTHSCHILD, M
论文数:
0
引用数:
0
h-index:
0
ROTHSCHILD, M
DORAN, SP
论文数:
0
引用数:
0
h-index:
0
DORAN, SP
SEDLACEK, JHC
论文数:
0
引用数:
0
h-index:
0
SEDLACEK, JHC
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
|
1987年
/ 5卷
/ 01期
关键词
:
D O I
:
10.1116/1.583917
中图分类号
:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号
:
0808 ;
0809 ;
摘要
:
引用
收藏
页码:419 / 422
页数:4
相关论文
共 16 条
[11]
Sachdev S., 1985, Semiconductor International, V8, P306
[12]
Computer simulation of target link explosion in laser programmable redundancy for silicon memory
Scarfone, L. M.
论文数:
0
引用数:
0
h-index:
0
机构:
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Scarfone, L. M.
Chlipala, J. D.
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T Bell Labs, Allentown, PA 18103 USA
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Chlipala, J. D.
[J].
JOURNAL OF MATERIALS RESEARCH,
1986,
1
(02)
: 368
-
381
[13]
SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
SRINIVASAN, R
MAYNEBANTON, V
论文数:
0
引用数:
0
h-index:
0
MAYNEBANTON, V
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(06)
: 576
-
578
[14]
A TECHNOLOGY FOR OPTICAL INTERCONNECTIONS BASED ON MULTICHIP INTEGRATION
TSANG, DZ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
TSANG, DZ
SMYTHE, DL
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
SMYTHE, DL
CHU, A
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
CHU, A
LAMBERT, JJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
LAMBERT, JJ
[J].
OPTICAL ENGINEERING,
1986,
25
(10)
: 1127
-
1131
[15]
LASER-CONTROLLED CHEMICAL ETCHING OF ALUMINUM
TSAO, JY
论文数:
0
引用数:
0
h-index:
0
TSAO, JY
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
[J].
APPLIED PHYSICS LETTERS,
1983,
43
(02)
: 146
-
148
[16]
LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TUNGSTEN ON POLYCRYSTALLINE AND SINGLE-CRYSTAL SILICON VIA THE SILICON REDUCTION
TSAO, KY
论文数:
0
引用数:
0
h-index:
0
机构:
GOULD RES CTR,ROLLING MEADOWS,IL 60008
GOULD RES CTR,ROLLING MEADOWS,IL 60008
TSAO, KY
BUSTA, HH
论文数:
0
引用数:
0
h-index:
0
机构:
GOULD RES CTR,ROLLING MEADOWS,IL 60008
GOULD RES CTR,ROLLING MEADOWS,IL 60008
BUSTA, HH
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1984,
131
(11)
: 2702
-
2708
←
1
2
→
共 16 条
[11]
Sachdev S., 1985, Semiconductor International, V8, P306
[12]
Computer simulation of target link explosion in laser programmable redundancy for silicon memory
Scarfone, L. M.
论文数:
0
引用数:
0
h-index:
0
机构:
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Scarfone, L. M.
Chlipala, J. D.
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T Bell Labs, Allentown, PA 18103 USA
Univ Vermont, Dept Phys, Burlington, VT 05405 USA
Chlipala, J. D.
[J].
JOURNAL OF MATERIALS RESEARCH,
1986,
1
(02)
: 368
-
381
[13]
SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
SRINIVASAN, R
MAYNEBANTON, V
论文数:
0
引用数:
0
h-index:
0
MAYNEBANTON, V
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(06)
: 576
-
578
[14]
A TECHNOLOGY FOR OPTICAL INTERCONNECTIONS BASED ON MULTICHIP INTEGRATION
TSANG, DZ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
TSANG, DZ
SMYTHE, DL
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
SMYTHE, DL
CHU, A
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
CHU, A
LAMBERT, JJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, Lexington, MA, USA, MIT, Lexington, MA, USA
LAMBERT, JJ
[J].
OPTICAL ENGINEERING,
1986,
25
(10)
: 1127
-
1131
[15]
LASER-CONTROLLED CHEMICAL ETCHING OF ALUMINUM
TSAO, JY
论文数:
0
引用数:
0
h-index:
0
TSAO, JY
EHRLICH, DJ
论文数:
0
引用数:
0
h-index:
0
EHRLICH, DJ
[J].
APPLIED PHYSICS LETTERS,
1983,
43
(02)
: 146
-
148
[16]
LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF TUNGSTEN ON POLYCRYSTALLINE AND SINGLE-CRYSTAL SILICON VIA THE SILICON REDUCTION
TSAO, KY
论文数:
0
引用数:
0
h-index:
0
机构:
GOULD RES CTR,ROLLING MEADOWS,IL 60008
GOULD RES CTR,ROLLING MEADOWS,IL 60008
TSAO, KY
BUSTA, HH
论文数:
0
引用数:
0
h-index:
0
机构:
GOULD RES CTR,ROLLING MEADOWS,IL 60008
GOULD RES CTR,ROLLING MEADOWS,IL 60008
BUSTA, HH
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1984,
131
(11)
: 2702
-
2708
←
1
2
→