LOW GROWTH TEMPERATURE ALGAAS CURRENT BLOCKING LAYERS FOR USE IN SURFACE NORMAL OPTOELECTRONIC DEVICES

被引:22
作者
ROGERS, TJ
LEI, C
STREETMAN, BG
DEPPE, DG
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 03期
关键词
D O I
10.1116/1.586741
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The application of thin (approximately 1000-5000 angstrom) layers of low-temperature (LT) molecular beam epitaxially (MBE) grown AlGaAs as current blocking layers is investigated. Data are presented regarding the current-voltage characteristics of resistors incorporating such layers, and it is shown that layers as thin as 1000 angstrom are highly resistive when biased to less than 8 V. Lateral current confinement is demonstrated for both surface-emitting light-emitting diodes and vertical-cavity surface-emitting laser (VCSEL) diodes through the use of MBE regrowth over a patterned layer of LT AlGaAs. The VCSEL devices exhibit low series resistance with only 1.8 V at a threshold current of 1.9 mA for 10-mum-diam devices.
引用
收藏
页码:926 / 928
页数:3
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