CORRECTION TERMS FOR CONTACTS TO DIFFUSED RESISTORS

被引:2
作者
DANDREA, G
MURRMANN, H
机构
关键词
D O I
10.1109/T-ED.1970.17016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:484 / &
相关论文
共 6 条
[1]  
BERGER HH, 1969, IEEE INT SOL STAT CI, P160
[2]   MEASUREMENT OF CONTACT RESISTANCE BETWEEN METAL AND DIFFUSION LAYER IN SI PLANAR ELEMENTS [J].
MURRMANN, H ;
WIDMANN, D .
SOLID-STATE ELECTRONICS, 1969, 12 (11) :879-&
[3]  
MURRMANN H, 1969, IEEE T ELECTRON DEVI, VED16, P1022
[4]  
WARNER RW, 1965, INTEGRATED CIRCUITS, P255
[5]  
1963, INTEGRATED SILICON D, V1
[6]  
AD408961