DISSOCIATIVE IONIZATION OF SILANE

被引：39

作者：

HAALAND, P ^{[1
]}

机构：

[1] USAF,INST TECHNOL,WRIGHT PATTERSON AFB,OH 45433

来源：

CHEMICAL PHYSICS LETTERS | 1990年 / 170卷 / 2-3期

关键词：

D O I：

10.1016/0009-2614(90)87106-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The dissociative ionization cross-sections of silane (SiH4), have been measured by Fourier transform mass spectrometry. Neither the molecular ion SiH4+ nor the hydrogen ions H2+, H+ are formed by electron impact. Cross-sections for the other silicon hydride ions at 50 eV are: σ(SiH3+) = (0.5 ± 0.08) × 10-16 cm2, σ(SiH2+) = (0.74 ± 0.11) × 10-16 cm2, σ(SiH+) = (0.21 ± 0.03) × 10-16 cm2, and σ(Si+) = (0.19 ± 0.03) × 10-16 cm2. © 1990.

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页码：146 / 152

页数：7

相关论文

共 26 条

[1] PHOTOIONIZATION MASS-SPECTROMETRIC STUDIES OF SIHN (N=1-4) [J].

BERKOWITZ, J ;

GREENE, JP ;

CHO, H ;

RUSCIC, B .

JOURNAL OF CHEMICAL PHYSICS, 1987, 86 (03) :1235-1248

[2] PHOTOIONIZATION MASS-SPECTROMETRY OF SILANE [J].

BORLIN, K ;

HEINIS, T ;

JUNGEN, M .

CHEMICAL PHYSICS, 1986, 103 (01) :93-100

[3] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J].

CHATHAM, H ;

HILS, D ;

ROBERTSON, R ;

GALLAGHER, A .

JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) :1770-1777

[4] THE VALENCE ORBITAL MOMENTUM DISTRIBUTIONS AND BINDING-ENERGY SPECTRA OF SILANE BY ELECTRON MOMENTUM SPECTROSCOPY - QUANTITATIVE COMPARISONS USING HARTREE-FOCK LIMIT AND CORRELATED WAVEFUNCTIONS [J].

CLARK, SAC ;

WEIGOLD, E ;

BRION, CE ;

DAVIDSON, ER ;

FREY, RF ;

BOYLE, CM ;

VONNIESSEN, W ;

SCHIRMER, J .

CHEMICAL PHYSICS, 1989, 134 (2-3) :229-239

[5] FOURIER-TRANSFORM ION-CYCLOTRON RESONANCE SPECTROSCOPY [J].

COMISAROW, MB ;

MARSHALL, AG .

CHEMICAL PHYSICS LETTERS, 1974, 25 (02) :282-283

[6] THEORY OF FOURIER-TRANSFORM ION-CYCLOTRON RESONANCE MASS-SPECTROSCOPY .2. SIGNAL MODELING FOR ION-CYCLOTRON RESONANCE [J].

COMISAROW, MB .

JOURNAL OF CHEMICAL PHYSICS, 1978, 69 (09) :4097-4104

[7]

COOPER G, 1980, CHEM PHYS, V140, P133

[8]

CURTISS LA, 1987, J PHYS CHEM-US, V91, P3637

[9]

CURTISS LA, 1987, J PHYS CHEM-US, V91, P155

[10] ON THE DECOMPOSITION OF SILANE IN PLASMA DEPOSITION REACTORS [J].

DEJOSEPH, CA ;

HAALAND, PD ;

GARSCADDEN, A .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :165-172