RELATIONSHIP BETWEEN GAS SENSITIVITY AND FILM STRUCTURE OF SNO2 THIN-FILM GAS SENSOR BY SOL-GEL METHOD

被引:12
作者
KANAMORI, M [1 ]
TAKEUCHI, M [1 ]
OHYA, Y [1 ]
TAKAHASHI, Y [1 ]
机构
[1] GIFU UNIV, FAC ENGN, DEPT CHEM, GIFU 50111, JAPAN
关键词
D O I
10.1246/cl.1994.2035
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Gas sensing properties of SnO2 films prepared by sol-gel method are investigated to be strongly dependent on the firing temperature conditions. The films obtained at 400 degrees C have much higher sensitivity than those at 800 degrees C, being attributed to the fact that the crystallite size of the films linearly increased with the firing temperature. Probable mechanisms to explain the sensing properties are discussed.
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页码:2035 / 2038
页数:4
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