A HIGHLY SENSITIVE SILICON CHIP MICROTRANSDUCER FOR AIR-FLOW AND DIFFERENTIAL PRESSURE SENSING APPLICATIONS

被引：75

作者：

JOHNSON, RG

HIGASHI, RE

机构：

[1] Honeywell Physical Sciences Cent,, Bloomington, MN, USA, Honeywell Physical Sciences Cent, Bloomington, MN, USA

来源：

SENSORS AND ACTUATORS | 1987年 / 11卷 / 01期

关键词：

AIR FLOW - DIFFERENTIAL PRESSURE SENSING - SILICON CHIP MICROTRANSDUCER;

D O I：

10.1016/0250-6874(87)85005-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

收藏

页码：63 / 72

页数：10

相关论文

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[2] ANISOTROPIC ETCHING OF SILICON
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[3] JOHNSON RG, 1985, 1985 P INT C SOL STA, P358
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