A NEW APPARATUS FOR MEASURING THERMAL-EXPANSION OF THIN-FILMS

被引:4
作者
IWASAKI, Y [1 ]
KANEKO, M [1 ]
HAYASHI, K [1 ]
OCHIAI, Y [1 ]
HAYAKAWA, M [1 ]
ASO, K [1 ]
机构
[1] SONY CORP,CORP RES LAB,SHINAGAWAKU,TOKYO 114,JAPAN
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1989年 / 22卷 / 07期
关键词
D O I
10.1088/0022-3735/22/7/016
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:498 / 502
页数:5
相关论文
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