PLASMA PROPERTIES AND STOICHIOMETRY OF LASER-DEPOSITED BISRCACUO THIN-FILMS

被引：22

作者：

GONZALO, J

AFONSO, CN

VEGA, F

GARCIA, DM

PERRIERE, J

机构：

[1] CSIC,INST OPT,E-28006 MADRID,SPAIN

[2] UNIV VALENCIA,DEPT FIS APLICADA,E-46100 BURJASSOT,SPAIN

[3] UNIV PARIS 07,PHYS SOLIDES GRP,URA 17,F-75251 PARIS 05,FRANCE

[4] UNIV PARIS 06,PHYS SOLIDES GRP,URA 17,F-75251 PARIS 05,FRANCE

来源：

APPLIED SURFACE SCIENCE | 1995年 / 86卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00365-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The composition of BiSrCaCuO films deposited by laser ablation in different gas environments (At or O-2) is related to the interaction processes observed in the plasma by means of optical emission spectroscopy. It is found that films deposited in Ar or O-2 exhibit an increase of Bi and a decrease of Sr, Ca and Cu contents with respect to films deposited in vacuum. These changes in composition are discussed in terms of the processes that may affect the film growth such as collisional interaction processes in the gas phase and re-sputtering.

引用

页码：40 / 44

页数：5

共 16 条

[1] STUDY OF LASER ABLATION OF BISRCACUO [J].