MONTE-CARLO SIMULATIONS OF THE TRANSPORT OF LASER-ABLATED ATOMS IN A DILUTED GAS

被引:110
作者
KOOLS, JCS
机构
[1] Philips Research Laboratories, 5656 AA, Eindhoven
关键词
D O I
10.1063/1.355141
中图分类号
O59 [应用物理学];
学科分类号
摘要
The interaction between gas clouds, created by laser ablation, and a diluted gas background is studied by means of Monte Carlo simulations. More specifically, the effect of elastic collisions between ablated atoms and background gas atoms on the kinetic energy and spatial distributions of atoms arriving at the substrate is investigated. The pressure regime under study is typically the range 0.1-200 mTorr. Thermalization is observed in a pressure range that varies over two orders of magnitude, dependent on the initial energy of the atoms and the ratio of the background gas and ablated atom molecular masses. During the first stages of thermalization, forward focusing is found to occur.
引用
收藏
页码:6401 / 6406
页数:6
相关论文
共 20 条
[1]  
BAL LT, 1986, J APPL PHYS, V59, P720
[2]   LASER ABLATION OF Y2O3 IN AN OXYGEN ATMOSPHERE [J].
DYE, RC ;
MUENCHAUSEN, RE ;
NOGAR, NS .
CHEMICAL PHYSICS LETTERS, 1991, 181 (06) :531-536
[3]   DYNAMICS OF EXCIMER LASER ABLATION OF SUPERCONDUCTORS IN AN OXYGEN ENVIRONMENT [J].
DYER, PE ;
ISSA, A ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1990, 57 (02) :186-188
[4]  
GEOGEHAN DB, 1992, APPL PHYS LETT, V60, P2732
[5]  
GEOGEHAN DB, 1992, THIN SOLID FILMS, V220, P13
[6]   DYNAMICS OF EXCIMER LASER-ABLATED ALUMINUM NEUTRAL ATOM PLUME MEASURED BY DYE-LASER RESONANCE-ABSORPTION PHOTOGRAPHY [J].
GILGENBACH, RM ;
VENTZEK, PLG .
APPLIED PHYSICS LETTERS, 1991, 58 (15) :1597-1599
[7]   DIRECT IMAGING OF THE FRAGMENTS PRODUCED DURING EXCIMER LASER ABLATION OF YBA2CU3O7-DELTA [J].
GUPTA, A ;
BRAREN, B ;
CASEY, KG ;
HUSSEY, BW ;
KELLY, R .
APPLIED PHYSICS LETTERS, 1991, 59 (11) :1302-1304
[8]   PRIMARY AND SECONDARY MECHANISMS IN LASER-PULSE SPUTTERING [J].
KELLY, R ;
MIOTELLO, A ;
BRAREN, B ;
GUPTA, A ;
CASEY, K .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 65 (1-4) :187-199
[9]   ANGLE-RESOLVED TIME-OF-FLIGHT STUDIES ON GROUND-STATE NEUTRALS FORMED BY NEAR-THRESHOLD EXCIMER-LASER ABLATION OF COPPER [J].
KOOLS, JCS ;
DIELEMAN, J .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :4163-4167
[10]   GAS-FLOW DYNAMICS IN LASER ABLATION DEPOSITION [J].
KOOLS, JCS ;
BALLER, TS ;
DEZWART, ST ;
DIELEMAN, J .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) :4547-4556