共 20 条
[11]
KOOLS JCS, 1992, THESIS EINDHOVEN U T
[12]
KOOLS JCS, 1993, APPL SURF SCI, V69, P13
[14]
LEUCHTNER RE, 1991, UNPUB FALL MAT RES S
[17]
MONTE-CARLO CALCULATIONS OF THE PROPERTIES OF SPUTTERED ATOMS AT A SUBSTRATE SURFACE IN A MAGNETRON DISCHARGE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (03)
:455-461
[18]
VANDERIET E, 1993, J APPL PHYS, V73, P8296