APPLICATION OF PARALLEL DISK MODEL FOR UNEVEN FILM THINNING

被引:23
作者
LIEM, AJS [1 ]
WOODS, DR [1 ]
机构
[1] MCMASTER UNIV,DEPT CHEM ENGN,HAMILTON,ONTARIO,CANADA
关键词
D O I
10.1002/cjce.5450520215
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
引用
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页码:222 / 227
页数:6
相关论文
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