LOW-VOLTAGE HIGH-GAIN RESONANT-CAVITY AVALANCHE PHOTODIODE

被引:35
作者
KUCHIBHOTLA, R
SRINIVASAN, A
CAMPBELL, JC
LEI, C
DEPPE, DG
HE, YS
STREETMAN, BG
机构
[1] Microelectronics Research Center, University of Texas at Austin, Austin
关键词
D O I
10.1109/68.82110
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For p-i-n photodiodes and avalanche photodiodes in the low-gain regime, there is a performance tradeoff between the transit-time contribution to the bandwidth and the quantum efficiency. We demonstrate a new photodetector structure that alleviates limitations imposed by this tradeoff. This structure utilizes a thin (almost-equal-to 900 angstrom), depleted absorbing layer to reduce the transit time and achieve avalanche gain at low bias voltage (V(b) almost-equal-to 9 V). The external quantum efficiency has been enhanced (eta-e > 49%) by incorporating the structure into a resonant cavity.
引用
收藏
页码:354 / 356
页数:3
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