SURFACE DAMAGE FROM DIAMOND-SAW CUTTING OF HIGH-PURITY MO STUDIED BY POSITRONS

被引：10

作者：

HANSEN, HE

PETERSEN, K

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 69卷 / 02期

关键词：

D O I：

10.1002/pssa.2210690223

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：625 / 629

页数：5

共 14 条

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