VERSATILE UHV SAMPLE TRANSFER SYSTEM

被引:20
作者
CLAUSING, RE
HEATHERLY, L
EMERSON, LC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
Compendex;
D O I
10.1116/1.570063
中图分类号
O59 [应用物理学];
学科分类号
摘要
A vacuum transfer system has been developed that allows samples to be inserted from air into an Auger analyzer. Following an initial analysis they may then be moved to and from a separate vacuum chamber for other studies. The system is constructed of standard UHV components and can be fabricated to cover any desired transfer distance. All-metal sealed valves isolate the various chambers so that the vacuum integrity of each is maintained. The sample size is limited only by the smallest constriction within the components, which is 2 cm in the system described. The transfer is rapid and is capable of being controlled remotely for use in a hostile environment.
引用
收藏
页码:708 / 710
页数:3
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