QUANTITATIVE MICROANALYSIS OF OXYGEN IN ZIRCONIUM BY AUGER-ELECTRON SPECTROSCOPY

Calibration curves for quantitative microanalysis of oxygen in zirconium by Auger electron spectroscopy have been derived from studies of well-characterized standards using a PHI 590A SAM. Knowledge of the intensity-energy response function of this instrument assures long-term reproducibility and may permit transfer of the results. Auger electron spectra were recorded in the pulse-counting mode from surfaces that had been thoroughly cleaned by argon-ion sputter etching and therefore incorporate any preferential sputtering effects. Surface recontamination by reactive constituents of the residual gas was determined to be unimportant for short analysis times in clean ultrahigh vacuum. Electron-stimulated desorption of oxygen was found to be significant at high incident electron-beam current densities and was accounted for empirically. Linear calibration curves were obtained using O and Zr peak areas measured above simple tangent backgrounds.