HETERO-EPITAXIAL GROWTH OF CUBIC SILICON-CARBIDE ON FOREIGN SUBSTRATES

被引:98
作者
MATSUNAMI, H [1 ]
NISHINO, S [1 ]
ONO, H [1 ]
机构
[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,SAYKY,KYOTO,JAPAN
关键词
D O I
10.1109/T-ED.1981.20556
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1235 / 1236
页数:2
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