DESIGN AND PERFORMANCE OF A HIGH-RESOLUTION PHOTOELECTRON MICROSCOPE

被引：60

作者：

REMPFER, GF

SKOCZYLAS, WP

GRIFFITH, OH

机构：

[1] PORTLAND STATE UNIV, DEPT MECH ENGN, PORTLAND, OR 97207 USA

[2] UNIV OREGON, INST MOLEC BIOL, EUGENE, OR 97403 USA

来源：

ULTRAMICROSCOPY | 1991年 / 36卷 / 1-3期

关键词：

D O I：

10.1016/0304-3991(91)90151-U

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The design of a high-resolution photoelectron microscope (photoelectron emission microscope) is described. It is an oil-free ultrahigh-vacuum instrument utilizing electrostatic electron optics. New designs are presented for a specimen translator, cathode stage, aperture stop control, electrostatic hexapole stigmator, beam shutter, and camera system. These components could also be used in a low-energy electron microscope (LEEM). The theoretical resolution of this instrument is 5 nm for UV illumination near the photoemission threshold. The photoelectron microscope is now in operation at the University of Oregon, and it is achieving results within a factor of two of this design limit.

引用

页码：196 / 221

页数：26

共 27 条

[1] SURFACE STUDIES BY LOW-ENERGY ELECTRON-MICROSCOPY (LEEM) AND CONVENTIONAL UV PHOTOEMISSION ELECTRON-MICROSCOPY (PEEM) [J].