PROGRESS AND PROSPECTS FOR GAN AND THE III-V-NITRIDE SEMICONDUCTORS

被引:248
作者
STRITE, S [1 ]
LIN, ME [1 ]
MORKOC, H [1 ]
机构
[1] UNIV ILLINOIS,MAT RES LAB,104 S GOODWIN,URBANA,IL 61801
关键词
D O I
10.1016/0040-6090(93)90713-Y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review recent research results pertaining to GaN, AlN and InN, focusing on present-day techniques and future prospects. The molecular beam epitaxy and metal - organic vapor phase epitaxy growth techniques, as they have been applied to the nitrides, are described. New developments in plasma-based sources and substrates are covered. We also discuss the most recent developments towards an eventual GaN-based device technology, including the first GaN p-n junction light-emitting diode. Ongoing work, aimed at developing the necessary processing skills for GaN devices, is presented. We conclude by discussing near-term goals and identifying critical areas in need of future research.
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页码:197 / 210
页数:14
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