P-TYPE ZNSE BY NITROGEN ATOM BEAM DOPING DURING MOLECULAR-BEAM EPITAXIAL-GROWTH

被引:575
作者
PARK, RM [1 ]
TROFFER, MB [1 ]
ROULEAU, CM [1 ]
DEPUYDT, JM [1 ]
HAASE, MA [1 ]
机构
[1] THREE M CO,3M CTR,ST PAUL,MN 55144
关键词
D O I
10.1063/1.103919
中图分类号
O59 [应用物理学];
学科分类号
摘要
A novel approach to producing p-type ZnSe epitaxial layers is reported which involves nitrogen atom beam doping during molecular beam epitaxial growth. Net acceptor concentrations as large as 3.4×1017 cm -3 have been measured in nitrogen atom beam doped ZnSe/GaAs heteroepitaxial layers which represents the highest acceptor concentration reported to date for ZnSe:N epitaxial material grown by molecular beam epitaxy. In addition, light-emitting diodes based on ZnSe:N/ZnSe:Cl, p-n homojunctions have been found to exhibit dominant electroluminescence in the blue region of the visible spectrum at room temperature.
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页码:2127 / 2129
页数:3
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