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ENERGY-DISTRIBUTION OF DEFECTS IN THIN-FILMS DEPOSITED AT LOW-TEMPERATURE

被引：2
作者：
AKHOUAYRI, H
BELZONS, M
BLANC, R
CAMOIN, C
机构：
来源：
THIN SOLID FILMS | 1980年 / 66卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90224-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：211 / 216
页数：6
相关论文
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