NONDESTRUCTIVE, REVERSE DECORATION OF DEFECTS IN IC PASSIVATION OVERCOATS

被引:11
作者
COMIZZOLI, RB [1 ]
机构
[1] RCA LABS,PRINCETON,NJ 08540
关键词
D O I
10.1149/1.2133488
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1087 / 1095
页数:9
相关论文
共 19 条
[1]  
BART JJ, 1975, ANN P RELIAB PHYS SY, V13, P128
[2]  
Comizzoli R. B., 1972, P IEEE, V60, P348
[3]   BULK AND SURFACE CONDUCTION IN CVD SIO2 AND PSG PASSIVATION LAYERS [J].
COMIZZOLI, RB .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (03) :386-391
[4]  
COMIZZOLI RB, 1976, RCA REV, V37, P483
[5]  
COMIZZOLI RB, 1976, MAY EL SOC M WASH
[6]  
COMIZZOLI RB, 1976, RCA REV, V37, P472
[7]  
GREGORITSCH AJ, 1975, ANN P RELIAB PHYS SY, V13, P121
[8]  
GRUNTHANER FJ, 1975, ANN P RELIAB PHYS SY, V13, P99
[9]  
KERN W, 1973, RCA REV, V34, P655
[10]  
KERN W, NBS40031 PUBL