BULK AND SURFACE CONDUCTION IN CVD SIO2 AND PSG PASSIVATION LAYERS

被引：23

作者：

COMIZZOLI, RB ^{[1
]}

机构：

[1] RCA LABS, PRINCETON, NJ 08540 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 03期

关键词：

D O I：

10.1149/1.2132832

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：386 / 391

页数：6

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