DIFFUSE REFLECTANCE INFRARED FOURIER-TRANSFORM STUDY OF THE PLASMA HYDROGENATION OF DIAMOND SURFACES

被引:35
作者
ANDO, T
ISHII, M
KAMO, M
SATO, Y
机构
来源
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS | 1993年 / 89卷 / 09期
关键词
D O I
10.1039/ft9938901383
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Plasma hydrogenation of diamond surfaces was investigated using a diffuse reflectance infrared Fourier-transform (DRIFT) technique. Hydrogenation was carried out under microwave plasma conditions similar to those used for the chemical vapour deposition of diamond. Surface species chemisorbed on the diamond surface were characterized by DRIFT spectroscopy. The number of hydrogen-carbon bonds increased and the structure of the chemisorbed species on the diamond surfaces changed on increasing the temperature of the plasma hydrogenation.
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页码:1383 / 1386
页数:4
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